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Title: Use of surfactants for improved particle performance of dHF-based cleaning recipes
Authors: Vos, R. ×
Xu, Kaidong
Lux, M.
Fyen, Wim
Singh, R.
Chen, Z.
Mertens, P.
Hatcher, Z.
Heyns, Marc #
Issue Date: 2001
Publisher: Scitec publications ltd
Series Title: Ultra clean processing of silicon surfaces 2000 vol:76-77 pages:263-266
Abstract: A basic understanding of the interactions between a particle and the wafer substrate during cleaning is presented and the usefulness of surfactants to improve the overall particle performance for dHF-cleaning mixtures is described.
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:TTO Association
Metallurgy and Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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