|ITEM METADATA RECORD
|Title: ||Ultra-clean or just-clean-enough technology|
|Authors: ||Heyns, Marc # ×|
|Issue Date: ||Dec-1994 |
|Publisher: ||Pennwell publ co solid state technology office|
|Series Title: ||Solid state technology vol:37 issue:12 pages:128-&|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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