Title: Ultra-clean or just-clean-enough technology
Authors: Heyns, Marc # ×
Issue Date: Dec-1994
Publisher: Pennwell publ co solid state technology office
Series Title: Solid state technology vol:37 issue:12 pages:128-&
ISSN: 0038-111X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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