Title: Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers
Authors: Lapadatu, D ×
Pyka, A
Dziuban, J
Puers, Robert #
Issue Date: Mar-1996
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:6 issue:1 pages:73-76
Abstract: This paper presents some theoretical considerations and experimental results carried out to investigate the potential use of corrugated silicon nitride membranes as a mechanical suspension in micromachined silicon capacitive accelerometers.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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