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Title: Impact of high-temperature processing on bulk defects in czochralski silicon
Authors: Claeys, Corneel ×
Bender, H
Declerck, Gilbert
Vanlanduyt, J
Vanoverstraeten, R
Amelinckx, S #
Issue Date: 1983
Publisher: Elsevier science bv
Series Title: Physica b & c vol:116 issue:1-3 pages:148-161
ISSN: 0378-4371
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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