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Title: Proximity-effect correction in electron-beam lithography
Authors: Vermeulen, Paul ×
Jonckheere, R
Van den hove, Luc #
Issue Date: Nov-1989
Publisher: Amer inst physics
Series Title: Journal of vacuum science & technology b vol:7 issue:6 pages:1556-1560
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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