Title: On the homogeneous nucleation of dislocations during integrated-circuit processing
Authors: Vanhellemont, J ×
Bender, H
Claeys, Corneel #
Issue Date: 1989
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:104 pages:461-466
Abstract: The homogeneous nucleation of dislocations in silicon by the direct condensation of self-interstitials is discussed. A two-step nucleation mechanism is proposed that allows to understand both low and high temperature observations.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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