Title: Aes and xps analysis of the interaction of ti with si and sio2 during rta
Authors: Bender, H ×
Chen, Wd
Portillo, J
Van den hove, Luc
Vandervorst, Wilfried #
Issue Date: Sep-1989
Publisher: Elsevier science bv
Series Title: Applied surface science vol:38 issue:1-4 pages:37-47
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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