Title: Degradation of doped si regions contacted with transition-metal silicides due to metal-dopant compound formation
Authors: Maex, Karen ×
Ghosh, G
Delaey, Lucas
De Keersmaecker, Roger #
Issue Date: Sep-1989
Publisher: Elsevier science bv
Host Document: Applied surface science vol:38 issue:1-4 pages:185-185
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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