ITEM METADATA RECORD
Title: Homogeneous gas-phase nucleation of silane in low-pressure chemical vapor-deposition (lpcvd)
Authors: Qian, Zm ×
Michiel, H
Vanammel, A
Nijs, Johan
Mertens, R #
Issue Date: Sep-1988
Publisher: Electrochemical soc inc
Series Title: Journal of the electrochemical society vol:135 issue:9 pages:2378-2379
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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