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Title: Redistribution of dopants during silicide formation - relevance of silicide diffusion versus main moving species
Authors: Maex, Karen ×
Van den hove, Luc
Dekeersmaecker, Rf
Oberlin, Jc
Perio, A
Torres, J
Bomchil, G
Vanderweg, Wf #
Issue Date: Mar-1987
Publisher: Soc francaise du vid
Series Title: Vide-science technique et applications vol:42 issue:236 pages:95-97
ISSN: 1266-0167
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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