Title: Electrodeposited copper inductors for intraocular pressure telemetry
Authors: Puers, Robert ×
Vandevoorde, Glenn
De Bruyker, Dirk #
Issue Date: Jun-2000
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:10 issue:2 pages:124-129
Abstract: A microsystem for wireless long-term measurement of the intraocular pressure is presented. The sensing element is a novel distributed parallel-resonant inductive-capacative circuit. with a pressure-dependent resonance frequency. This circuit is bared upon a twofold on-chip deposited inductor. The high Q inductor is deposited by electrodeposition of copper on a micromachined chip incorporating a pressure-sensitive diaphragm. Test structures were fabricated and characterized. Q factors of 30 at 45 MHz and inductance values of 0.4 mu H are obtained for 3 x 3 mm(2) structures.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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