Title: Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material
Authors: Reyntjens, Steve ×
Puers, Robert #
Issue Date: Jun-2000
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:10 issue:2 pages:181-188
Abstract: In this work, some of the possibilities of focused ion beams for applications in microsystem technology are explored. Unlike most previous studies, the emphasis is on 'additive' techniques, i.e. localized maskless deposition of metals and insulators. More precisely, we will show the possibility of fabricating small three-dimensional structures, using focused ion beam deposition of silicon oxide. Deposition examples will show that the technique is most promising for small post-processing steps or prototyping, because of its high degree of flexibility. Furthermore, an investigation into the mechanical properties of the deposited material is presented. More specifically, the Young's modulus of the deposited silicon oxide is determined.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science