Title: Integrating electro-discharge machining and photolithography
Authors: Reynaerts, Dominiek ×
Meeussen, Wim
Song, Xiaoyan
Van Brussel, Hendrik
Reyntjens, Steve
De Bruyker, Dirk
Puers, Robert #
Issue Date: Oct-2000
Publisher: IOP Publishing LTD
Series Title: Journal of Micromechanics and Microengineering vol:10 issue:2 pages:189-195
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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