Title: The characterization of a miniature silicon micromachined capacitive accelerometer
Authors: Puers, Robert ×
Reyntjens, Steve #
Issue Date: Jun-1998
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:8 issue:2 pages:127-133
Abstract: The merit of extremely small capacitive accelerometers has been widely recognized. However, with decreasing size, the characterization of and readout circuitry for these devices become increasingly complex.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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