ITEM METADATA RECORD
Title: The evolution of process-induced defects in arsenic-implanted silicon
Authors: Cerofolini, Gf ×
Meda, L
Polignano, Ml
Ottaviani, G
Bender, H
Claeys, Corneel
Armigliato, A
Solmi, S #
Issue Date: Mar-1986
Publisher: Electrochemical soc inc
Host Document: Journal of the electrochemical society vol:133 issue:3 pages:C103-C103
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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