|ITEM METADATA RECORD
|Title: ||The evolution of process-induced defects in arsenic-implanted silicon|
|Authors: ||Cerofolini, Gf ×|
Solmi, S #
|Issue Date: ||Mar-1986 |
|Publisher: ||Electrochemical soc inc|
|Host Document: ||Journal of the electrochemical society vol:133 issue:3 pages:C103-C103|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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