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Title: Comparison between p-type dopants for shallow junction formation by diffusion from an ion-implanted silicide
Authors: Lippens, P ×
Maex, Karen
Van den hove, Luc
De Keersmaecker, Roger #
Issue Date: Mar-1989
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms vol:39 issue:1-4 pages:330-333
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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