Title: Hydrogen implantation into (100) silicon - a study of the released damage
Authors: Meda, L ×
Cerofolini, Gf
Dierckx, R
Mercurio, G
Servidori, M
Cembali, F
Anderle, M
Canteri, R
Ottaviani, G
Claeys, Corneel
Vanhellemont, J #
Issue Date: Mar-1989
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms vol:39 issue:1-4 pages:381-385
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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