Title: Creating multi-layered structures with freestanding parts in SU-8
Authors: Ceyssens, Frederik ×
Puers, Robert #
Issue Date: Jun-2006
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:16 issue:6 pages:S19-S23
Abstract: This paper reports on a new method to create multi-layered structures with freestanding parts in SU-8. Examples of such structures are beams partially resting on a post or microchannels. The method, based on high-absorption UV light with a wavelength of 313 nm in SU-8, is fast, uses only traditional micromachining equipment and requires very few processing steps. It is well suited for thin freestanding layers (< 15 mu m). Furthermore, a variant of a method that uses a built-in UV blocking layer to enable freestanding structures is described in detail. This method has a broader application range in terms of the thickness of the freestanding parts. Both methods are applied to the fabrication of optical fiber clamps.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science