Title: Structural and electrical characterization of swami techniques for sub-micron technologies
Authors: Claeys, Corneel ×
Vanhellemont, J
Cavioni, T
Gualandris, F #
Issue Date: Sep-1989
Publisher: Electrochemical soc inc
Series Title: Journal of the electrochemical society vol:136 issue:9 pages:2619-2624
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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