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Title: Degradation of the poly-si silicide structure in advanced mos-technologies
Authors: Lippens, P ×
Maex, Karen
Van den hove, Luc
De Keersmaecker, Roger
Probst, V
Koppenol, W
Vanderweg, W #
Issue Date: Sep-1988
Publisher: Editions physique
Series Title: Journal de physique vol:49 issue:C-4 pages:191-194
ISSN: 0302-0738
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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