Title: Film-edge-induced dislocation generation in silicon substrates .2. application of the theoretical-model for local oxidation processes on (001) silicon substrates
Authors: Vanhellemont, J ×
Amelinckx, S
Claeys, Corneel #
Issue Date: Mar-1987
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:61 issue:6 pages:2176-2188
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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