Title: The amorphization and subsequent recovery of insitu annealed asymmetric+ implanted silicon
Authors: Claeys, Corneel ×
Bender, H
Cerofolini, Gf
Meda, L #
Issue Date: Apr-1989
Publisher: Electrochemical soc inc
Series Title: Journal of the electrochemical society vol:136 issue:4 pages:1190-1194
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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