Title: The amorphization and subsequent recovery of insitu annealed ion-implanted silicon
Authors: Claeys, Corneel ×
Bender, H
Cerofolini, G
Meda, L #
Issue Date: Mar-1987
Publisher: Electrochemical soc inc
Host Document: Journal of the electrochemical society vol:134 issue:3 pages:C122-C122
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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