Title: Degradation of doped si regions contacted with transition-metal silicides due to metal-dopant compound formation
Authors: Maex, Karen ×
Dekeersmaecker, Rf
Ghosh, G
Delaey, Lucas
Probst, V #
Issue Date: Dec-1989
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:66 issue:11 pages:5327-5334
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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