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Title: Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
Authors: Opsomer, Karl ×
Deduytsche, D
Detavernier, C
Van Meirhaeghe, R. L
Lauwers, A
Maex, Karen
Lavoie, C #
Issue Date: Jan-2007
Publisher: Amer inst physics
Series Title: Applied Physics Letters vol:90 issue:3 pages:-
Abstract: A strong influence of substrate crystallinity is observed for thin-film Co/Ge reactions. For the detected phases (CoGe, Co5Ge7, and CoGe2), the formation temperatures on amorphous Ge (a-Ge) are found to be the lowest, while the highest are on single-crystalline Ge(100). Moreover, while the phase sequence on Ge(100) and polycrystalline Ge (poly-Ge) was unaltered, the formation of intermediate Co5Ge7 was not observed on a-Ge. It is likely that this is due to a promoted CoGe2 formation on a-Ge, resulting in a similar to 200 degrees C decrease in formation temperature (depending on the ramp rate). These observations suggest a strong competition among the formation of these Ge-rich phases. (c) 2007 American Institute of Physics.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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