ITEM METADATA RECORD
Title: Compensation structures for convex corner micromachining in silicon
Authors: Puers, Robert ×
Sansen, Willy #
Issue Date: Apr-1990
Publisher: Elsevier science sa lausanne
Series Title: Sensors and actuators a-physical vol:23 issue:1-3 pages:1036-1041
URI: 
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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