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Title: Characterization of silicon-nitride dry etching in sf6/he mixtures
Authors: Laes, E ×
Coopmans, F
Verdonck, P
Declerck, Gilbert
Peeters, G #
Issue Date: 1983
Publisher: Electrochemical soc inc
Host Document: Journal of the electrochemical society vol:130 issue:3 pages:C81-C81
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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