Title: Time-of-flight telescope for heavy-ion RBS
Authors: Giangrandi, Simone ×
Brijs, B
Sajavaara, T
Arstila, K
Vantomme, André
Vandervorst, Wilfried #
Issue Date: Aug-2007
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:261 issue:1-2 pages:529-533
Abstract: This paper describes a time-of-flight (TOF) spectrometer for Heavy-Ion Rutherford Backscattering Spectrometry (HI-RBS) recently installed at IMEC for thin film analysis. The TOF telescope allows the use of ion beams heavier than He, with advantages in terms of depth and mass resolution and sensitivity compared to conventional RBS based on planar Si detectors.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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