|ITEM METADATA RECORD
|Title: ||Hvem studies of nitride film edge induced defect generation in silicon substrates|
|Authors: ||Vanhellemont, J|
Vanlanduyt, J #
|Issue Date: ||1987 |
|Publisher: ||Iop publishing ltd|
|Series Title: ||Institute of physics conference series issue:87 pages:439-444|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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