Title: Hvem studies of nitride film edge induced defect generation in silicon substrates
Authors: Vanhellemont, J
Claeys, Corneel
Vanlanduyt, J #
Issue Date: 1987
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:87 pages:439-444
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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