Title: Defect distribution in self-annealed and in 2-step as+ion implanted silicon
Authors: Bender, H ×
Claeys, Corneel
Cerofolini, Cf
Meda, L #
Issue Date: 1987
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:87 pages:485-490
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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