Title: Film-edge-induced dislocation generation in silicon substrates .3. high-voltage transmission electron-microscopy observations and theoretical results for (111) and (011) silicon substrates
Authors: Vanhellemont, J ×
Claeys, Corneel #
Issue Date: Jun-1988
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:63 issue:12 pages:5703-5711
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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