Title: A new concept for a self-testable pressure sensor based on the bimetal effect
Authors: Lapadatu, AC ×
De Bruyker, Dirk
Jakobsen, H
Puers, Robert #
Issue Date: May-2000
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:82 issue:1-3 pages:69-73
Abstract: This paper presents a 'double-membrane pressure sensor', with integrated self-test. One membrane is used as the pressure sensitive element, combining the capacitive and the piezoresistive sensing principles. The other one is a bimetallic actuator, involving a silicon/aluminium pair, which is used to check the operation of the pressure sensor. The two functions, pressure sensing and actuation, are separated in order to improve the device efficiency and to reduce the negative thermal effects.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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