Sensors and actuators a-physical vol:82 issue:1-3 pages:69-73
This paper presents a 'double-membrane pressure sensor', with integrated self-test. One membrane is used as the pressure sensitive element, combining the capacitive and the piezoresistive sensing principles. The other one is a bimetallic actuator, involving a silicon/aluminium pair, which is used to check the operation of the pressure sensor. The two functions, pressure sensing and actuation, are separated in order to improve the device efficiency and to reduce the negative thermal effects.