Title: Thermostatic control for temperature compensation of a silicon pressure sensor
Authors: De Bruyker, Dirk ×
Puers, Robert #
Issue Date: May-2000
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:82 issue:1-3 pages:120-127
Abstract: An alternative temperature compensation technique for a silicon pressure sensor is presented. By using on-chip heater and temperature sensing electrodes, a thermostatic control loop is implemented. The sensor is biased at a reference temperature, which is maintained with high accuracy over a specified range, hereby eliminating the dependence of the pressure sensor output on ambient temperature. No additional calibration procedures for temperature compensation or external temperature sensing elements are required. Modelling aspects as well as experimental results are discussed. (C) 2000 Elsevier Science S.A. All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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