ITEM METADATA RECORD
Title: Special issue on semiconductor manufacturing science - lecture notes of the summer course on manufacturing science, leuven, belgium, june 12-15, 1990
Authors: Declerck, Gilbert ×
Demeyer, K #
Issue Date: Feb-1991
Publisher: Elsevier science bv
Series Title: Microelectronic Engineering vol:10 issue:3-4 pages:159-159
URI: 
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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