ITEM METADATA RECORD
Title: Gettering mechanisms in silicon
Authors: Polignano, Ml ×
Cerofolini, Gf
Bender, H
Claeys, Corneel #
Issue Date: Jul-1988
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:64 issue:2 pages:869-876
URI: 
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science