Title: The autonomous impact resonator: a new operating principle for a silicon resonant strain gauge
Authors: Bienstman, Jan ×
Vandewalle, Joos
Puers, Robert #
Issue Date: Apr-1998
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:66 issue:1-3 pages:40-49
Abstract: A new oscillation principle for silicon resonators, based on large vibrational amplitudes and on non-linear effects, is described. Using only a capacitive microbridge, a resistor and a d.c. source, an autonomous oscillator can be obtained without the need for an external oscillator circuit. An electromechanical model is derived and a general mathematical description is given. The autonomous impact oscillator exhibits periodic as well as chaotic behaviour. The behaviour is simulated and a stability analysis is presented. Experimental results validate the model and the proposed oscillation mechanism. (C) 1998 Elsevier Science S.A. All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
ESAT - STADIUS, Stadius Centre for Dynamical Systems, Signal Processing and Data Analytics
× corresponding author
# (joint) last author

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