Sensors and actuators a-physical vol:66 issue:1-3 pages:40-49
A new oscillation principle for silicon resonators, based on large vibrational amplitudes and on non-linear effects, is described. Using only a capacitive microbridge, a resistor and a d.c. source, an autonomous oscillator can be obtained without the need for an external oscillator circuit. An electromechanical model is derived and a general mathematical description is given. The autonomous impact oscillator exhibits periodic as well as chaotic behaviour. The behaviour is simulated and a stability analysis is presented. Experimental results validate the model and the proposed oscillation mechanism. (C) 1998 Elsevier Science S.A. All rights reserved.