Title: Low-temperature plasma enhanced cvd of highly conductive single crystalline and polycrystalline silicon materials
Authors: Nijs, Johan ×
Baert, K
Symons, J
Kobayashi, K
Deschepper, P #
Issue Date: Jan-1989
Publisher: Elsevier science bv
Series Title: Applied surface science vol:36 issue:1-4 pages:23-38
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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