|ITEM METADATA RECORD
|Title: ||Structural and electrical characterization of swami techniques for sub-micron technologies|
|Authors: ||Claeys, Corneel ×|
Gualandris, F #
|Issue Date: ||Mar-1988 |
|Publisher: ||Electrochemical soc inc|
|Host Document: ||Journal of the electrochemical society vol:135 issue:3 pages:C129-C129|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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