Title: A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation
Authors: De Bruyker, Dirk ×
Cozma, A
Puers, Robert #
Issue Date: Apr-1998
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:66 issue:1-3 pages:70-75
Abstract: A new pressure sensor combining a piezoresistive and a capacitive measurement principle is described. Both the mechanical stress in a thin silicon diaphragm as well as the deflection are measured. The sensor has the additional feature that its operation can be checked by means of a thermal actuator, integrated in the device. Applying electrical power to a heater I results in an internal pressure rise, allowing the sensor output to be checked and eventually adjusted. Experimental results on sensor operation and self-test actuation are presented and discussed. (C) 1998 Elsevier Science S.A. All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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