Title: Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD
Authors: Puers, Robert ×
Reyntjens, Steve #
Issue Date: Aug-2001
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:92 issue:1-3 pages:249-256
Abstract: Focused ion beam (FIB) enables the deposition of three-dimensional mechanical structures. In this contribution, a novel application of this technique is presented: structures are deposited in such a way that a hermetic encapsulation is created. Moreover, within this encapsulation, a vacuum is present.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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