Sensors and actuators a-physical vol:67 issue:1-3 pages:13-17
The silicon-aluminium bimetal effect has been used to actuate a thin membrane, similar to the ones used in silicon pressure sensors. The experimental results are presented for different dimensions of the structure. It is shown that, contrary to the formulas given in some papers, it is not only the bimetal effect which must be taken into consideration for evaluating the behaviour of such a structure. Thermal expansion of the membrane against the fixed walls is equally important, being able to change considerably the result of this thermal actuation. (C) 1998 Elsevier Science S.A. All rights reserved.