Title: On the mechanisms in thermally actuated composite diaphragms
Authors: Puers, Robert ×
Cozma, A
De Bruyker, Dirk #
Issue Date: May-1998
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:67 issue:1-3 pages:13-17
Abstract: The silicon-aluminium bimetal effect has been used to actuate a thin membrane, similar to the ones used in silicon pressure sensors. The experimental results are presented for different dimensions of the structure. It is shown that, contrary to the formulas given in some papers, it is not only the bimetal effect which must be taken into consideration for evaluating the behaviour of such a structure. Thermal expansion of the membrane against the fixed walls is equally important, being able to change considerably the result of this thermal actuation. (C) 1998 Elsevier Science S.A. All rights reserved.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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