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Title: Study of the rapid thermal nitridation and silicidation of ti using elastic recoil detection .1. ti on si
Authors: Krooshof, Gjp ×
Habraken, Fhpm
Vanderweg, Wf
Van den hove, Luc
Maex, Karen
Dekeersmaecker, Rf #
Issue Date: May-1988
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:63 issue:10 pages:5104-5109
URI: 
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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