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Title: An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
Authors: Rottenberg, X ×
Brebels, S
Ekkels, Phillip
Czarnecki, Piotr
Nolmans, P
Mertens, R. P
Nauwelaers, Bart
Puers, Robert
DeWolf, I
De Raedt, W
Tilmans, H. A. C #
Issue Date: Jul-2007
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:17 issue:7 pages:S204-S210
Abstract: This paper presents a novel electrostatic actuator using fringing fields as the actuation mechanism, i.e. an electrostatic fringing-field actuator or EFFA. The novel device is produced on an insulating substrate in a simple two-mask process involving only one sacrificial layer and one metallization. To demonstrate the EFFA capabilities, we produced and characterized EFFAs in various technological implementations of remarkable simplicity. This simplicity allows a vast flexibility for the processing and as a result strongly eases the integration of the EFFAs into existing technologies. For the basic device, we report a non-de-embedded measured capacitance ratio of 1: 3 and a lifetime of more than 107 cycles with 40 V bipolar actuation at 100 Hz in N-2 atmosphere. Both the capacitance ratio and the C-V profile were tuned by modifying the technology, e. g. coating the substrate before processing the EFFAs and the design, e. g. switching from clamped-free to clamped-clamped devices. We finally report a complete RF-MEMS technology using the EFFAs as single actuators. Switchable and tunable LC tanks, phase shifters, series and shunt parallel-plate capacitors actuated as relays and capacitive relays are presented to demonstrate the possibilities of this technology.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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