Title: A PDMS lipseal for hydraulic and pneumatic microactuators
Authors: De Volder, MichaĆ«l ×
Ceyssens, Frederik
Reynaerts, Dominiek
Puers, Robert #
Issue Date: Jul-2007
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:17 issue:7 pages:1232-1237
Abstract: Recent publications show that hydraulic and pneumatic microactuators offer superior power and force densities at the microscale. The main technological barrier for the development of these actuators is the lack of microseal technologies. These seals must prevent the driving fluid leaking to the outside world without introducing friction. This paper presents a method to fabricate miniature lipseals in batch quantities. A simulation method for the design of these seals is developed and validated experimentally. Hydraulic and pneumatic actuators comprising lipseals have been fabricated and tested. These prototype actuators have an outside diameter of 1.5 mm, and were able to generate forces of 1.2 N at a supply pressure of 1.6 MPa.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science