Journal of Micromechanics and Microengineering vol:17 issue:7 pages:1232-1237
Recent publications show that hydraulic and pneumatic microactuators offer superior power and force densities at the microscale. The main technological barrier for the development of these actuators is the lack of microseal technologies. These seals must prevent the driving fluid leaking to the outside world without introducing friction. This paper presents a method to fabricate miniature lipseals in batch quantities. A simulation method for the design of these seals is developed and validated experimentally. Hydraulic and pneumatic actuators comprising lipseals have been fabricated and tested. These prototype actuators have an outside diameter of 1.5 mm, and were able to generate forces of 1.2 N at a supply pressure of 1.6 MPa.