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Title: Direct and post-injection oxide and interface-trap generation resulting from low-temperature hot-electron injection
Authors: Vandenbosch, G ×
Groeseneken, Guido
Maes, He #
Issue Date: Nov-1993
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:74 issue:9 pages:5582-5586
Abstract: We have studied direct and post-injection trap generation, induced by low-temperature (approximately 77 K) hot-electron injection. At these temperatures the main degradation mechanism, attributed to the release, migration, and subsequent reaction of a hydrogenic species is inoperative, not only due to the suppressed release but also to the freeze-out of the species motion. As a result, trap creation is strongly reduced as compared to room-temperature injection. Additional interface traps are created during warmup following low-temperature injection. Two post-injection generation processes have been observed: a low-temperature (120 K), bias-independent process believed to be related to the migration of neutral atomic hydrogen released during stress, and a high-temperature (250 K), negative-bias enhanced process that apparently cannot be attributed to the migration of a species, but rather resembles the negative-bias-temperature instability
URI: 
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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