Title: A physical model to predict stiction in MEMS (vol 12, pg 702, 2002)
Authors: van Spengen, WM
Puers, Robert
De Wolf, Ingrid
Issue Date: Jan-2006
Publisher: Iop publishing ltd
Series Title: Journal of micromechanics and microengineering vol:16 issue:1 pages:189-189
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous

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