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Title: Impact of a chlorine oxidation on the properties of silicon bulk defects
Authors: Claeys, Corneel ×
Declerck, Gilbert
Vanoverstraeten, R
Bender, H
Vanlanduyt, J
Amelinckx, S #
Issue Date: 1981
Publisher: Electrochemical soc inc
Host Document: Journal of the electrochemical society vol:128 issue:3 pages:C98-C98
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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