Title: A novel combined redundant pressure sensor with self-test function
Authors: Puers, Robert ×
DeBruyker, D
Cozma, A #
Issue Date: May-1997
Publisher: Elsevier science sa lausanne
Series Title: Sensors and actuators a-physical vol:60 issue:1-3 pages:68-71
Abstract: This paper presents a method to overcome the uncertainty in functionality of pressure sensors. A novel redundant measurement method is demonstrated. Moreover, the feasibility of the first silicon pressure sensor with self-test function is proposed. Both specifications (redundancy and self-test) are integrated in a single device and combine a piezoresistive Wheatstone bridge with a capacitive sensor and a thermopneumatic actuator, the latter being used as a fail-check of the device.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science