Sensors and actuators a-physical vol:60 issue:1-3 pages:68-71
This paper presents a method to overcome the uncertainty in functionality of pressure sensors. A novel redundant measurement method is demonstrated. Moreover, the feasibility of the first silicon pressure sensor with self-test function is proposed. Both specifications (redundancy and self-test) are integrated in a single device and combine a piezoresistive Wheatstone bridge with a capacitive sensor and a thermopneumatic actuator, the latter being used as a fail-check of the device.