Title: On the anodic passivation of silicon in aqueous KOH solutions
Authors: Lapadatu, D ×
Puers, Robert #
Issue Date: May-1997
Publisher: Elsevier science sa lausanne
Series Title: Sensors and actuators a-physical vol:60 issue:1-3 pages:191-196
Abstract: This paper proposes a new explanation to account for the anodic passivation of single-crystalline silicon in aqueous KOH. The effects of the KOH concentration, temperature and illumination are discussed. The presented model is in good agreement with earlier reported experimental results.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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