Title: The NanoPirani - an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping
Authors: Puers, Robert ×
Reyntjens, Steve
De Bruyker, D #
Issue Date: Apr-2002
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:97-8 pages:208-214
Abstract: This paper reports an extremely miniaturized pressure sensor. In its smallest version, the sensor's active area is a mere 10mum x 1 mum. The sensor's working principle is that of Pirani-type vacuum sensors. However, unlike most Pirani sensors, the working range of the device is around atmospheric pressure.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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